Engineers from TMC and PI have developed active vibration isolation technology based on piezo ceramic solid state actuators that has become an established solution in nano-lithography applications. However, active vibration cancellation can also improve stability and resolution in super-resolution microscopy applications.
Based on digital signal processing algorithms and responsive PI piezo technology with the latest ultra-reliability enhancements, patented STACIS active isolators have proven their dependability in mission-critical fab deployment for over a decade. STACIS is now available in small form-factors ideal for emerging applications ranging from advanced microscopies to nanomanufacturing.
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