Microstructures Technology (MST) and MEMS: An Industry and Market Evaluation

MicroStructures (or MicroSystems) Technology (MST) is an outgrowth of semiconductor technology. It was found, over twenty years ago, that selective doping and etching could produce three-dimensional elements on a silicon wafer and, that by utilizing "sacrificial" layers, it was possible to selectively undercut some of these elements to allow them to "float" above the surface of the substrate.

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