In the paper given by these authors in Spring 2002 at Photomask Japan, investigations into the advances in the CATSTM tool that combine hierarchical fracturing and distributed processing were begun. In addition to the beneficial reduction in processing times, various shortcomings of the software were detailed.
For this study, the next version of the CATS software tool has been made available and those shortcomings are remedied. Difficult model OPC (MOPC) fractures and complicated de-slivering fractures for variable shaped beam machines are analyzed. Timing results, exclusive-OR operations, and the implications of Amdahl's Law are also considered. Further intricacies of Linux cluster computing are also addressed.
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