10/6/2005 - IMEC has licensed its RotagoniTM drying technique to the Precision Machinery Company, Ebara Corporation, Japan, a leading equipment supplier for the semiconductor industry. The patented drying technique allows for a fast, high-performance, watermark-free drying necessary to single-wafer wet cleaning.
Sub-100nm design rules require fast and efficient rinsing and drying techniques for single-wafer processing. The RotagoniTM drying technique is an answer to these needs. Using this drying technique, a horizontally placed wafer rotates at low speed while ultra-pure water and a tensio-active vapor are dispensed onto the wafer surface. This gives rise to the so-called Marangoni effect, a surface-tension-gradient effect that creates a force on parts of the liquid, which removes the rinsing liquid physically rather than by evaporation. This results in a fast, high-performance and watermark-free drying technique.
"This agreement with Ebara underlines the innovative character and significance of our RotagoniTM drying technique," says Gilbert Declerck, president and CEO of IMEC. "We are very pleased that the RotagoniTM drying technique will be integrated in the products and tools of Ebara Corporation."
"We hope and believe that the integration of the RotagoniTM drying technique would give added value and potential competitiveness to our wet processes and equipment," says Manabu Tsujimura, CTO, Precision Machinery Company, Ebara Corporation. "Ebara wishes that this would become a good start of long-term relationship with IMEC."
About Ebara Corporation
EBARA contributes to society by providing expert technology and engineering services, for a prosperous future for all mankind, through business centering on areas pertaining to water, air, and environment. Precision Machinery Company of EBARA creates clean environments that are crucial to the fabrication and processing of semiconductor devices. The company is making rapid progress in diverse areas, from components such as vacuum pumps and gas scrubbers to process equipment such as a chemical mechanical polisher and electroplating.
EBARA has its headquarter in Tokyo, Japan, has its offices, subsidiaries, joint ventures or representatives in more than 20 countries, and has 15,000 people in its group worldwide. Ebara was established in 1912, and its FY2004 net sales were J-Yen 478 Billion.
IMEC is a world leading independent research center in nanoelectronics and nanotechnology. Its research focuses on the next-generation of chips and systems, and on the enabling technologies for ambient intelligence. IMEC's research bridges the gap between fundamental research at universities and technology development in industry. Its unique balance of processing and system know-how, intellectual property portfolio, state-of-the-art infrastructure and a strong network of companies, universities and research institutes worldwide, positions IMEC as a key partner with which to develop and improve technologies for future systems.
IMEC is headquartered in Leuven, Belgium and has representatives in the US, China and Japan. Its staff of more than 1300 people includes over 400 industrial residents and guest researchers. In 2004 its revenues were EUR159 million.
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