Agilent Enables Precise Automated Wafer Testing with 41000 Series iPACE

5/26/2004 - Agilent Technologies Inc. (NYSE: A) introduced its 41000 Series Integrated Parametric Analysis and Characterization Environment (iPACE), which includes advanced switching matrix technology and a new atto current sense and switch unit (ASU) that enables automation of parametric instruments without compromising measurement performance. The integration of these capabilities into one product allows R&D scientists and engineers in the semiconductor industry to speed wafer characterization and lower cost of test, while enhancing test flexibility and performance.

In the past, a parameter analyzer's full measurement performance was obtained using positioners on a wafer prober, limiting the ability to perform automated test. In addition, customers using positioners could not easily switch from making capacitance versus voltage (CV) and current versus voltage (IV) measurements. Using the analyzer with a switching matrix and probe card -- another option -- degraded the measurement resolution of the analyzer.

The Agilent 41000 Series allows customers to take advantage of Agilent's advanced switching matrix, wafer prober interface, and ASU technology without sacrificing measurement accuracy. Agilent offers the 41000 Series racked and cabled, in both probe-card-based and positioner-based models. The probe-card-based versions use Agilent's direct docking and low-leakage probe card technology, which provide a complete IV and CV measurement environment on a wafer prober for up to 48 pins with 1 fA measurement resolution. The positioner-based solutions use Agilent's ASU technology to enable current measurement with 0.1 fA resolution, as well as allow automated switching between IV and CV measurement.

"The Agilent 41000 Series is a measurement solution without compromise for the user," said Minoru Ebihara, vice president and general manager of Agilent's Hachioji Semiconductor Test Division, Automated Test Group. "As a primary leader in parametric test, Agilent is dedicated to developing tools that will support our customers' objectives of maximizing productivity and reducing expenditures."

Pricing and Availability
The Agilent 41000 Series is available for order June 1 starting at a price of $80,000. Agilent will offer two probe-card-based solutions in 1 fA and 10 fA measurement resolution versions (models 300 and 400). Later this year, Agilent expects to release a positioner-based integrated solution in 0.1 fA and 1 fA versions (model 100 and 200). More information about the product can be found at

About Agilent Technologies
Agilent Technologies Inc. (NYSE: A) is a global technology leader in communications, electronics, life sciences and chemical analysis. The company's 28,000 employees serve customers in more than 110 countries. Agilent had net revenue of $6.1 billion in fiscal year 2003. Information about Agilent is available on the Web at

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