Agilent Unveils Multi-site, Reliability Testing for 90 nm Wafers

7/17/2003 - Agilent Technologies Inc. (NYSE: A) announced the industry's first complete solution for simultaneous, reliability testing of multiple sites on a single silicon wafer.

Developed to meet the critical needs of 90 nanometer or smaller process technologies used in the manufacture of semiconductors, Parallel Parametric Reliability provides long-term process reliability data quickly and efficiently at temperatures up to 350 C. The solution resulted from a collaboration between Agilent, Cascade Microtech and Celadon Systems.

The Parallel Parametric Reliability solution comprises the Agilent E5250A Low-Leakage Switch, E5270A 8-Slot Parametric Measurement Mainframe, and Tesla reliability software. It also includes Cascade AttoGuard probers and Celadon Systems' high-performance, multi-site probe cards.

"Until now, the only way to perform long-term reliability testing on wafers was to package the devices, which is both expensive and time consuming," said Louis Solis, Parametric Customer Solutions Program Manager, Agilent Technologies. "Today's thinner oxides and gate dielectrics are making it almost impossible to package the devices without destroying them. As process technologies move into the 90-nanometer range and 300 mm fabrication, it is becoming imperative to perform reliability testing on the wafer itself in order to prevent waste of expensive processed wafers. This is where our Parallel Parametric Reliability solution adds real value."

Parallel Parametric Reliability Ideal for Multi-Site Testing
The Agilent E5270A 8-Slot Parametric Measurement Mainframe forms the core of the Parallel Parametric Reliability solution's hardware. The instrument's high-speed measurement capability and modular configuration make it an ideal choice for multi-site reliability testing. The E5270A mainframe can hold up to eight medium-power source/monitor units, which can source up to 200 mA of current. The E5270A mainframe combines easily with the Agilent E5250A Low-Leakage Switch and Agilent E5255A Multiplexer modules to form a complete wafer-level, multi-site reliability testing solution. The foundation for the system is the Tesla reliability software, a comprehensive test shell that controls both the instruments and the wafer prober. Tesla supports true parallel testing and allows users to customize their own measurement algorithms. The interactive software, with diagnostic features, provides feedback on measured data.

Cascade Microtech's AttoGuard probers, with patented AttoGuard integrated guard shield, can test wafers at temperatures up to 350 C, with extremely low electrical noise. The large 6-inch by 8-inch microscope travel of these wafer probers makes it easy for users to align Celadon System's multi-site probe cards to the wafers.

U.S. Pricing and Availability
The Parallel Parametric Reliability system is expected to be available the third quarter of 2003 and is priced starting at $100,000.

About Cascade Microtech, Inc.
Cascade Microtech, Inc. is the world leader in high-frequency and parametric on-wafer test solutions. Engineers use these solutions to test and characterize integrated circuits (ICs) and photonic devices. Cascade Microtech also produces thin-film probe cards for production wafer testing of fine pitch, high-speed IC devices for broadband communications and networking, wireless and cell phones and applications. For more information visit

About Celadon Systems, Inc.
Celadon Systems, Inc. provides low noise, high temperature, single and multi-site wafer probe cards for the semiconductor market with headquarters in Burnsville, Minnesota and an office in Sunnyvale, CA. Celadon is positioned to be the leader in providing parametric test solutions for CMOS, Bipolar, Optoelectronics, LCD, GaAs, and MEMS in the worldwide market. For more information visit

About Agilent Technologies
Agilent Technologies Inc. (NYSE: A) is a global technology leader in communications, electronics, life sciences and chemical analysis. The company's 32,000 employees serve customers in more than 110 countries. Agilent had net revenue of $6 billion in fiscal year 2002. Information about Agilent is available on the Web at

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